X-ray photoelectron spectroscopy study of high-k CeO2/La2O3 stacked dielectrics

Title
X-ray photoelectron spectroscopy study of high-k CeO2/La2O3 stacked dielectrics
Authors
Keywords
-
Journal
AIP Advances
Volume 4, Issue 11, Pages 117117
Publisher
AIP Publishing
Online
2014-11-14
DOI
10.1063/1.4902017

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