Journal
AIP ADVANCES
Volume 2, Issue 4, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4773555
Keywords
-
Funding
- 973 Program of China [2012CB921700]
- NSFC [11027406]
- Beijing Municipal Commission of Education
- Division Of Materials Research
- Direct For Mathematical & Physical Scien [1005562] Funding Source: National Science Foundation
Ask authors/readers for more resources
By controlling the growth of complex oxide films with atomic precision, emergent phenomena and fascinating properties have been discovered, and even been manipulated. With oxide molecular beam epitaxy (OMBE) we grow high-quality SrTiO3(110) films by evaporating Sr and Ti metals with separate controls of the open/close timing of the shutters. The incident electron beam angle of the reflective high energy electron diffraction (RHEED) is adjusted to make the (01) beam sensitive to surface chemical concentration. By monitoring such an intensity, we tune the shutter timing to synchronize the evaporation amount of Sr and Ti in real-time. The intensity is further used as a feedback control signal for automatic growth optimization to fully compensate the possible fluctuation of the source flux rates upon extended growth. A 22 nm-thick film is obtained with the precision of metal cation stoichiometry better than 0.5%. Copyright 2012 Author(s). This article is distributed under a Creative Commons Attribution 3.0 Unported License. [http://dx.doi.org/10.1063/1.4773555]
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available