Journal
AIP ADVANCES
Volume 1, Issue 3, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3646148
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Funding
- U.S. National Science Foundation [CMMI-0644681, CMMI 1115903, CMMI-1109971]
- U.S. Air Force
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This paper presents the wavelength dependence of two-photon polymerization in SU-8 between 720-780 nm. The study is performed by microstructuring SU-8 through a single-shot exposure of SU-8 to 140 fs tunable laser pulses with 80 MHz repetition rate, or by laser direct writing. Two-photon absorption is closely related to one-photon absorption in pristine SU-8. By careful design of the neighboring micro-structures, or by varying wet-processing parameters during development, undistorted and unbended 3D micro-structures have been fabricated through direct laser writing. Copyright 2011 Author(s). This article is distributed under a Creative Commons Attribution 3.0 Unported License. [doi: 10.1063/1.3646148]
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