Mechanisms of suppressing secondary nucleation for low-power and low-temperature microwave plasma self-bias-enhanced growth of diamond films in argon diluted methane

Title
Mechanisms of suppressing secondary nucleation for low-power and low-temperature microwave plasma self-bias-enhanced growth of diamond films in argon diluted methane
Authors
Keywords
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Journal
AIP Advances
Volume 1, Issue 4, Pages 042117
Publisher
AIP Publishing
Online
2011-10-18
DOI
10.1063/1.3656241

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