4.0 Article

A Wireless Intraocular Pressure Sensor with Variable Inductance Using a Ferrite Material

Journal

JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
Volume 13, Issue 4, Pages 355-360

Publisher

IEEK PUBLICATION CENTER
DOI: 10.5573/JSTS.2013.13.4.355

Keywords

Ferrite; IOP sensor; resonance frequency; variable inductance

Funding

  1. Soongsil University

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A wireless intraocular (IOP) pressure sensor based on micro electro mechanical system (MEMS) technology is proposed. The proposed IOP sensor uses variable inductance according to the external pressure. The proposed sensor is composed of two flexible membranes: a ferrite bottom part, an inductor, and a capacitor. The inductance of the sensor varies according to the external pressure. The resonance frequency of the sensor is also varied, and this frequency is detected using an external coil. The external coil is designed with an FR-4 printed circuit board. The feasibility of the proposed sensor structure using variable inductance to detect the external pressure is successfully demonstrated.

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