High speed e-beam lithography for gold nanoarray fabrication and use in nanotechnology

Title
High speed e-beam lithography for gold nanoarray fabrication and use in nanotechnology
Authors
Keywords
-
Journal
Beilstein Journal of Nanotechnology
Volume 5, Issue -, Pages 1918-1925
Publisher
Beilstein Institut
Online
2014-10-30
DOI
10.3762/bjnano.5.202

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