Low-Loss Singlemode PECVD Silicon Nitride Photonic Wire Waveguides for 532–900 nm Wavelength Window Fabricated Within a CMOS Pilot Line

Published 2013 View Full Article

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Title
Low-Loss Singlemode PECVD Silicon Nitride Photonic Wire Waveguides for 532–900 nm Wavelength Window Fabricated Within a CMOS Pilot Line
Authors
Keywords
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Journal
IEEE Photonics Journal
Volume 5, Issue 6, Pages 2202809-2202809
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-12-10
DOI
10.1109/jphot.2013.2292698

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