HF-HNO3-H2SO4/H2O Mixtures for Etching Multicrystalline Silicon Surfaces: Formation of NO2+, Reaction Rates and Surface Morphologies

Published 2012 View Full Article

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Title
HF-HNO3-H2SO4/H2O Mixtures for Etching Multicrystalline Silicon Surfaces: Formation of NO2+, Reaction Rates and Surface Morphologies
Authors
Keywords
-
Journal
ZEITSCHRIFT FUR NATURFORSCHUNG SECTION B-A JOURNAL OF CHEMICAL SCIENCES
Volume 66, Issue -, Pages 0155
Publisher
Walter de Gruyter GmbH
Online
2012-03-11
DOI
10.5560/znb.2011.66b0155

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