Determination of the composition of Ultra-thin Ni-Si films on Si: constrained modeling of electron probe microanalysis and x-ray reflectivity data

Title
Determination of the composition of Ultra-thin Ni-Si films on Si: constrained modeling of electron probe microanalysis and x-ray reflectivity data
Authors
Keywords
-
Journal
X-RAY SPECTROMETRY
Volume 37, Issue 6, Pages 608-614
Publisher
Wiley
Online
2008-09-24
DOI
10.1002/xrs.1102

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