Experimental study and modeling of the effect of mixed size abrasive grits on surface topology and removal rate in wafer lapping

Published 2013 View Full Article

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Title
Experimental study and modeling of the effect of mixed size abrasive grits on surface topology and removal rate in wafer lapping
Authors
Keywords
-
Journal
WEAR
Volume 305, Issue 1-2, Pages 14-22
Publisher
Elsevier BV
Online
2013-05-30
DOI
10.1016/j.wear.2013.05.007

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