Modification of Electrode-Etchant for Sidewall Profile Control and Reduced Back-Channel Corrosion of Inverted-Staggered Metal-Oxide TFTs

Published 2015 View Full Article

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Title
Modification of Electrode-Etchant for Sidewall Profile Control and Reduced Back-Channel Corrosion of Inverted-Staggered Metal-Oxide TFTs
Authors
Keywords
-
Journal
ECS Journal of Solid State Science and Technology
Volume 4, Issue 12, Pages Q124-Q129
Publisher
The Electrochemical Society
Online
2015-10-11
DOI
10.1149/2.0181512jss

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