Room Temperature Photoluminescence and Raman Characterization of Interface Characteristics of SiN/SiO2/Si Prepared under Various Deposition Techniques and Conditions

Published 2015 View Full Article

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Title
Room Temperature Photoluminescence and Raman Characterization of Interface Characteristics of SiN/SiO2/Si Prepared under Various Deposition Techniques and Conditions
Authors
Keywords
-
Journal
ECS Journal of Solid State Science and Technology
Volume 4, Issue 7, Pages N76-N82
Publisher
The Electrochemical Society
Online
2015-05-17
DOI
10.1149/2.0291507jss

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