RF magnetron sputtered indium tin oxide films with high transmittance and work function for a-Si:H/c-Si heterojunction solar cells

Published 2013 View Full Article

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Title
RF magnetron sputtered indium tin oxide films with high transmittance and work function for a-Si:H/c-Si heterojunction solar cells
Authors
Keywords
-
Journal
VACUUM
Volume 101, Issue -, Pages 18-21
Publisher
Elsevier BV
Online
2013-07-14
DOI
10.1016/j.vacuum.2013.07.004

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