Reactive magnetron sputtering deposition and characterization of niobium carbide films

Published 2013 View Full Article

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Title
Reactive magnetron sputtering deposition and characterization of niobium carbide films
Authors
Keywords
-
Journal
VACUUM
Volume 99, Issue -, Pages 233-241
Publisher
Elsevier BV
Online
2013-07-03
DOI
10.1016/j.vacuum.2013.06.012

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