4.6 Article

Dewetting of template-confined Au films on SiC surface: From patterned films to patterned arrays of nanoparticles

Journal

VACUUM
Volume 99, Issue -, Pages 28-37

Publisher

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2013.04.021

Keywords

Metals; Nanostructures; Thin films; Annealing; Sputtering; Electron microscopy; Surface properties

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In this work we report about the template-confined dewetting of Au nanoscale film on SiC substrate in view of a surface patterning control. In this approach, the Au surface pattern order, on the SiC substrate, is established by a template confined deposition on a micrometric scale. Then, a film dewetting process is induced by thermal processes. Using scanning electron microscopy analyses, we studied the dewetting kinetics for Au on SiC and we identified three regimes of the process: a regime I in which holes nucleation in the Au film occurs (characterized by 248 meV activation energy); a regime II consisting in the retraction phenomenon of the film limited by the Au surface diffusion; a regime III corresponding to the merging of the dewetted fronts of holes that come close to each other (resulting in formation of Au nanoparticles). Correspondently, the ordered surface patterns obtained for the Au arrays of nanostructures on a large scale (micrometric) can be changed and controlled for specific applications. (c) 2013 Elsevier Ltd. All rights reserved.

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