Synthesis of SiGe layered structure in single crystalline Ge substrate by low energy Si ion implantation

Published 2013 View Full Article

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Title
Synthesis of SiGe layered structure in single crystalline Ge substrate by low energy Si ion implantation
Authors
Keywords
-
Journal
VACUUM
Volume 101, Issue -, Pages 387-393
Publisher
Elsevier BV
Online
2013-10-25
DOI
10.1016/j.vacuum.2013.10.016

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