Mechanical and corrosive characteristics of Ta/TaN multilayer coatings

Title
Mechanical and corrosive characteristics of Ta/TaN multilayer coatings
Authors
Keywords
-
Journal
VACUUM
Volume 89, Issue -, Pages 244-248
Publisher
Elsevier BV
Online
2012-05-29
DOI
10.1016/j.vacuum.2012.05.024

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