A comparative analysis of a-C:H films deposited from five hydrocarbons by thermal desorption spectroscopy

Published 2011 View Full Article

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Title
A comparative analysis of a-C:H films deposited from five hydrocarbons by thermal desorption spectroscopy
Authors
Keywords
-
Journal
VACUUM
Volume 86, Issue 6, Pages 667-671
Publisher
Elsevier BV
Online
2011-07-23
DOI
10.1016/j.vacuum.2011.07.037

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