Microstructure and property evolution of Cr-DLC films with different Cr content deposited by a hybrid beam technique

Published 2010 View Full Article

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Title
Microstructure and property evolution of Cr-DLC films with different Cr content deposited by a hybrid beam technique
Authors
Keywords
-
Journal
VACUUM
Volume 85, Issue 8, Pages 792-797
Publisher
Elsevier BV
Online
2010-12-08
DOI
10.1016/j.vacuum.2010.11.013

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