Influence of CH4 fraction on the composition, structure, and internal stress of the TiCN coatings deposited by LAFAD technique

Published 2010 View Full Article

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Title
Influence of CH4 fraction on the composition, structure, and internal stress of the TiCN coatings deposited by LAFAD technique
Authors
Keywords
-
Journal
VACUUM
Volume 85, Issue 1, Pages 89-94
Publisher
Elsevier BV
Online
2010-04-22
DOI
10.1016/j.vacuum.2010.04.007

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