Optical, electrical and structural characteristics of Al:ZnO thin films with various thicknesses deposited by DC sputtering at room temperature and annealed in air or vacuum

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Title
Optical, electrical and structural characteristics of Al:ZnO thin films with various thicknesses deposited by DC sputtering at room temperature and annealed in air or vacuum
Authors
Keywords
-
Journal
VACUUM
Volume 84, Issue 7, Pages 924-929
Publisher
Elsevier BV
Online
2010-01-12
DOI
10.1016/j.vacuum.2009.12.015

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