Journal
VACUUM
Volume 85, Issue 1, Pages 30-33Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2010.03.006
Keywords
Electron-beam evaporation; TiO2; SiOx; Multi-layer; Photocatalytic activity
Funding
- Ministry of Education, Science and Technology (MEST) [2009-0093818, 2009-0275]
- Korea Institute for Advancement of Technology (KIAT)
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TiO2/SiOx/TiOx multi-layers on quartz glass were prepared by electron-beam evaporation method and their structural and photocatalytic properties were investigated. The photocatalytic activity of the TiO2/SiOx/TiOx multi-layer was evaluated by the photodecomposition of methylene blue in aqueous solution. As the thickness of the SiOx inter-layer increased, the surface roughness of the TiO2/SiOx/TiOx multi-layer increased but the anatase crystallite size decreased. The TiO2/SiOx(80 nm)/TiOx multi-layer exhibited excellent photocatalytic activity resulting from higher surface roughness and more trap levels in the SiOx(80 nm) inter-layer. (C) 2010 Elsevier Ltd. All rights reserved.
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