Scaling behavior and structure transition of ZrO2 films deposited by RF magnetron sputtering

Published 2009 View Full Article

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Title
Scaling behavior and structure transition of ZrO2 films deposited by RF magnetron sputtering
Authors
Keywords
-
Journal
VACUUM
Volume 83, Issue 11, Pages 1311-1316
Publisher
Elsevier BV
Online
2009-04-18
DOI
10.1016/j.vacuum.2009.04.041

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