Mechanical properties and thermal stability of nitrogen incorporated diamond-like carbon films

Published 2009 View Full Article

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Title
Mechanical properties and thermal stability of nitrogen incorporated diamond-like carbon films
Authors
Keywords
-
Journal
VACUUM
Volume 83, Issue 11, Pages 1406-1410
Publisher
Elsevier BV
Online
2009-05-08
DOI
10.1016/j.vacuum.2009.04.072

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