Effects of strong magnetic field on plasma immersion ion implantation of dielectric substrates

Title
Effects of strong magnetic field on plasma immersion ion implantation of dielectric substrates
Authors
Keywords
-
Journal
VACUUM
Volume 83, Issue 12, Pages 1427-1430
Publisher
Elsevier BV
Online
2009-05-19
DOI
10.1016/j.vacuum.2009.04.073

Ask authors/readers for more resources

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started