Etching of n-GaN – Important step in device processing

Published 2009 View Full Article

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Title
Etching of n-GaN – Important step in device processing
Authors
Keywords
-
Journal
VACUUM
Volume 84, Issue 1, Pages 221-223
Publisher
Elsevier BV
Online
2009-06-10
DOI
10.1016/j.vacuum.2009.05.023

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