Investigation of light element contents in subsurface layers of silicon

Published 2009 View Full Article

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Title
Investigation of light element contents in subsurface layers of silicon
Authors
Keywords
-
Journal
VACUUM
Volume 83, Issue -, Pages S124-S126
Publisher
Elsevier BV
Online
2009-02-14
DOI
10.1016/j.vacuum.2009.01.042

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