Influence of oxygen/argon pressure ratio on the morphology, optical and electrical properties of ITO thin films deposited at room temperature

Published 2008 View Full Article

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Title
Influence of oxygen/argon pressure ratio on the morphology, optical and electrical properties of ITO thin films deposited at room temperature
Authors
Keywords
-
Journal
VACUUM
Volume 82, Issue 12, Pages 1507-1511
Publisher
Elsevier BV
Online
2008-04-09
DOI
10.1016/j.vacuum.2008.03.061

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