Ion conducting properties of hydrogen-containing Ta2O5 thin films prepared by reactive sputtering

Published 2008 View Full Article

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Title
Ion conducting properties of hydrogen-containing Ta2O5 thin films prepared by reactive sputtering
Authors
Keywords
-
Journal
VACUUM
Volume 83, Issue 3, Pages 528-530
Publisher
Elsevier BV
Online
2008-04-13
DOI
10.1016/j.vacuum.2008.04.018

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