Preparation of various DLC films by T-shaped filtered arc deposition and the effect of heat treatment on film properties

Published 2008 View Full Article

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Title
Preparation of various DLC films by T-shaped filtered arc deposition and the effect of heat treatment on film properties
Authors
Keywords
-
Journal
VACUUM
Volume 83, Issue 3, Pages 510-514
Publisher
Elsevier BV
Online
2008-04-13
DOI
10.1016/j.vacuum.2008.04.016

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