Fabrication of p-type ZnO thin films via magnetron sputtering and phosphorus diffusion

Published 2007 View Full Article

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Title
Fabrication of p-type ZnO thin films via magnetron sputtering and phosphorus diffusion
Authors
Keywords
-
Journal
VACUUM
Volume 82, Issue 5, Pages 510-513
Publisher
Elsevier BV
Online
2007-09-05
DOI
10.1016/j.vacuum.2007.08.010

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