SiOx-doped DLC films: Charge transport, dielectric properties and structure

Title
SiOx-doped DLC films: Charge transport, dielectric properties and structure
Authors
Keywords
-
Journal
VACUUM
Volume 82, Issue 6, Pages 617-622
Publisher
Elsevier BV
Online
2007-10-03
DOI
10.1016/j.vacuum.2007.09.007

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