Novel TiAlCN/VCN nanoscale multilayer PVD coatings deposited by the combined high-power impulse magnetron sputtering/unbalanced magnetron sputtering (HIPIMS/UBM) technology

Published 2008 View Full Article

Authors

Keywords

Journal

VACUUM

Volume 82, Issue 11, Pages 1312-1317

Publisher

Elsevier BV

Online

2008-04-09

DOI

10.1016/j.vacuum.2008.03.064

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VACUUM

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Reagent

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