Capacitive micromachined ultrasonic transducers (CMUTs) with isolation posts

Title
Capacitive micromachined ultrasonic transducers (CMUTs) with isolation posts
Authors
Keywords
-
Journal
ULTRASONICS
Volume 48, Issue 1, Pages 74-81
Publisher
Elsevier BV
Online
2008-01-07
DOI
10.1016/j.ultras.2007.11.006

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