3D analysis of advanced nano-devices using electron and atom probe tomography

Published 2013 View Full Article

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Title
3D analysis of advanced nano-devices using electron and atom probe tomography
Authors
Keywords
-
Journal
ULTRAMICROSCOPY
Volume 136, Issue -, Pages 185-192
Publisher
Elsevier BV
Online
2013-10-18
DOI
10.1016/j.ultramic.2013.10.001

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