3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography

Published 2013 View Full Article

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Title
3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography
Authors
Keywords
-
Journal
ULTRAMICROSCOPY
Volume 132, Issue -, Pages 65-69
Publisher
Elsevier BV
Online
2013-02-25
DOI
10.1016/j.ultramic.2012.09.013

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