Journal
ULTRAMICROSCOPY
Volume 124, Issue -, Pages 20-25Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.ultramic.2012.08.011
Keywords
Secondary electron microscope (SEM); Low-voltage SEM; Energy filtering; Secondary electron spectra; Back-scattered electron image; Contrast; Image analysis
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Secondary electron microscope (SEM) images have been obtained for practical materials using low primary electron energies and an in-lens type annular detector with changing negative bias voltage supplied to a grid placed in front of the detector. The kinetic-energy distribution of the detected electrons was evaluated by the gradient of the bias-energy dependence of the brightness of the images. This is divided into mainly two parts at about 500 V, high and low brightness in the low- and high-energy regions, respectively and shows difference among the surface regions having different composition and topography. The combination of the negative grid bias and the pixel-by-pixel image subtraction provides the band-pass filtered images and extracts the material and topographic information of the specimen surfaces. (C) 2012 Elsevier B.V. All rights reserved.
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