Atom probe analysis of a 3D finFET with high-k metal gate

Published 2010 View Full Article

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Title
Atom probe analysis of a 3D finFET with high-k metal gate
Authors
Keywords
-
Journal
ULTRAMICROSCOPY
Volume 111, Issue 6, Pages 530-534
Publisher
Elsevier BV
Online
2010-12-29
DOI
10.1016/j.ultramic.2010.12.025

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