Dopant distributions in n-MOSFET structure observed by atom probe tomography

Published 2009 View Full Article

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Title
Dopant distributions in n-MOSFET structure observed by atom probe tomography
Authors
Keywords
-
Journal
ULTRAMICROSCOPY
Volume 109, Issue 12, Pages 1479-1484
Publisher
Elsevier BV
Online
2009-08-28
DOI
10.1016/j.ultramic.2009.08.002

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