Molecular Dynamic Studies on Deformation of Polymer Resist During Thermal Nano Imprint Lithographic Process

Published 2009 View Full Article

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Title
Molecular Dynamic Studies on Deformation of Polymer Resist During Thermal Nano Imprint Lithographic Process
Authors
Keywords
-
Journal
TRIBOLOGY LETTERS
Volume 36, Issue 3, Pages 209-222
Publisher
Springer Nature
Online
2009-07-08
DOI
10.1007/s11249-009-9474-y

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