Preparation of Al-doped ZnO sputter target by hot pressing

Published 2011 View Full Article

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Title
Preparation of Al-doped ZnO sputter target by hot pressing
Authors
Keywords
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Journal
TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA
Volume 21, Issue 7, Pages 1550-1556
Publisher
Elsevier BV
Online
2011-09-26
DOI
10.1016/s1003-6326(11)60895-9

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