Low pressure chemical vapour deposition of BN: Relationship between gas phase chemistry and coating microstructure

Published 2018 View Full Article

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Title
Low pressure chemical vapour deposition of BN: Relationship between gas phase chemistry and coating microstructure
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 664, Issue -, Pages 106-114
Publisher
Elsevier BV
Online
2018-08-23
DOI
10.1016/j.tsf.2018.08.020

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