Microstructure characterization of nano-structured Cr/Cr2N multilayer films produced through radio frequency magnetron sputtering

Title
Microstructure characterization of nano-structured Cr/Cr2N multilayer films produced through radio frequency magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 550, Issue -, Pages 272-277
Publisher
Elsevier BV
Online
2013-11-21
DOI
10.1016/j.tsf.2013.11.016

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