Properties of boron-rich layer formed by boron diffusion in n-type silicon

Published 2014 View Full Article

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Title
Properties of boron-rich layer formed by boron diffusion in n-type silicon
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 564, Issue -, Pages 253-257
Publisher
Elsevier BV
Online
2014-05-24
DOI
10.1016/j.tsf.2014.05.038

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