Polysilicon thin films fabricated by solid phase crystallization using reformed crystallization annealing technique

Published 2013 View Full Article

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Title
Polysilicon thin films fabricated by solid phase crystallization using reformed crystallization annealing technique
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 551, Issue -, Pages 181-187
Publisher
Elsevier BV
Online
2013-12-02
DOI
10.1016/j.tsf.2013.11.098

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