Upgrading the “Berg-model” for reactive sputtering processes

Title
Upgrading the “Berg-model” for reactive sputtering processes
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 565, Issue -, Pages 186-192
Publisher
Elsevier BV
Online
2014-02-25
DOI
10.1016/j.tsf.2014.02.063

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