Structural and optical properties of zirconia thin films deposited by reactive high-power impulse magnetron sputtering

Published 2014 View Full Article

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Title
Structural and optical properties of zirconia thin films deposited by reactive high-power impulse magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 570, Issue -, Pages 404-411
Publisher
Elsevier BV
Online
2014-06-04
DOI
10.1016/j.tsf.2014.05.060

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