Critical assessment of the determination of residual stress profiles in thin films by means of the ion beam layer removal method

Published 2014 View Full Article

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Title
Critical assessment of the determination of residual stress profiles in thin films by means of the ion beam layer removal method
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 564, Issue -, Pages 321-330
Publisher
Elsevier BV
Online
2014-06-09
DOI
10.1016/j.tsf.2014.06.003

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