Microplasma copolymerization of amine and Si containing precursors

Title
Microplasma copolymerization of amine and Si containing precursors
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 564, Issue -, Pages 186-194
Publisher
Elsevier BV
Online
2014-06-08
DOI
10.1016/j.tsf.2014.06.004

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