Highly conductive epitaxial ZnO layers deposited by atomic layer deposition

Title
Highly conductive epitaxial ZnO layers deposited by atomic layer deposition
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 562, Issue -, Pages 485-489
Publisher
Elsevier BV
Online
2014-04-19
DOI
10.1016/j.tsf.2014.04.047

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